Rigaku unveils next-generation rotating anode technology
The new X-ray source supports challenging single crystal diffraction applications and offers an exclusive preview of the system's development.
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Global manufacturer of analytical instruments
rigaku.comLast updated
In short: Rigaku Corporation expanded its semiconductor metrology presence and secured a strategic investment from Onto Innovation.
The new X-ray source supports challenging single crystal diffraction applications and offers an exclusive preview of the system's development.
The alliance combines Rigaku's X-ray technologies with Onto Innovation's optical metrology and AI software for semiconductor process control. Onto acquires 27% of Rigaku shares.
The second-generation benchtop analyzers offer enhanced performance for industrial quality control, debuting at Pittcon 2026. They feature non-destructive analysis, compact design, and low maintenance.
It measures film thickness, composition, and bump structures for wafer-level processes in BEOL and packaging, stabilizing quality and yield. Features high-precision 3D bump metrology and dual-head X-ray source.
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