Rigaku enters strategic alliance with Onto Innovation
The alliance combines Rigaku's X-ray technologies with Onto Innovation's optical metrology and AI software for semiconductor process control. Onto acquires 27% of Rigaku shares.
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Latest news about Rigaku
In short: Rigaku expanded its semiconductor metrology capabilities through major strategic alliances and a significant share sale involving Carlyle Group.
Company announcements
Rigaku launches NEX QC II Series XRF analyzers
The second-generation benchtop analyzers offer enhanced performance for industrial quality control, debuting at Pittcon 2026. They feature non-destructive analysis, compact design, and low maintenance.
Rigaku launches ONYX 3200 semiconductor metrology system
It measures film thickness, composition, and bump structures for wafer-level processes in BEOL and packaging, stabilizing quality and yield. Features high-precision 3D bump metrology and dual-head X-ray source.
Rigaku launches XTRAIA MF-3400 wafer measurement instrument
It enables high-precision, nondestructive measurement for next-generation semiconductors used in AI and data centers. KIOXIA adopts it for 3D NAND production.
Media coverage
Why Onto Innovation (ONTO) Is Up 6.2% After Dragonfly G5 Momentum And Rigaku Partnership News
In recent days, Onto Innovation reported stronger-than-expected first-quarter 2026 results,...
Carlyle's Rigaku Deal Is Said to Draw Over 130 Foreign Entities
The international tranche of Carlyle Group's ¥81 billion ($508 million) sale of Rigaku Holdings shares was more than than 15 times subscribed, according to people...
Rigaku Launches Major Secondary Share Offering Ahead of Shareholder Shift
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Onto Innovation Reshapes Growth Path With Rigaku Stake And New Convertibles
Onto Innovation (NYSE:ONTO) is committing $710 million for a 27% stake in Rigaku Holdings as part of a new partnership in semiconductor metrology. The company...
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