EVG and imec demonstrate 200nm-pitch wafer-to-wafer hybrid bonding
The technology achieves record-high overlay accuracy below 40nm, enabling advanced logic-to-logic and memory-to-logic tier stacking for CMOS 2.0 scaling.
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Semiconductor manufacturing equipment supplier
evgroup.comLast updated
In short: EVG advanced semiconductor bonding technology and expanded its manufacturing and support footprint globally.
The technology achieves record-high overlay accuracy below 40nm, enabling advanced logic-to-logic and memory-to-logic tier stacking for CMOS 2.0 scaling.
The company will present its GEMINI FB, EVG40 D2W, IR LayerRelease, and LITHOSCALE XT systems for advanced packaging.
It achieved Five Star ratings and first-place finishes in multiple equipment categories, including lithography and specialty fab equipment.
They will use EVG's bonding and lithography tools for heterogeneous integration of chips.
Through their continued collaboration, Imec and EV Group (EVG) are focusing on advancing the overlay performance required for advanced logic-to-logic and memory-to-logic tier stacking. Imec...
The company also leads the development of PennyLane, an open-source software library for quantum computing and application development. Visit xanadu.ai or follow us on X...
New ultra-compact platform adds in-situ resist thickness metrology, wafer edge exposure and EVG®150-class performance in a smaller-scale, highly flexible format ST. FLORIAN, Austria, Feb. 18...
New EVG ® 40 D2W overlay metrology system provides 100 percent overlay measurement on every die at up to 15X higher throughput versus industry benchmark...
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